| 1 | Introduction—Processes and Variation Framework (PDF) |
| 2 | Semiconductor Process Variation (PDF - 2.2MB) |
| 3 | Mechanical Process Variation (PDF - 1.3MB) |
| 4 | Probability Models of Manufacturing Processes (PDF) |
| 5 | Probability Models, Parameter Estimation, and Sampling (PDF) |
| 6 | Sampling Distributions and Statistical Hypotheses (PDF) |
| 7 | Shewhart SPC and Process Capability (PDF) |
| 8 | Process Capability and Alternative SPC Methods (PDF) |
| 9 | Advanced and Multivariate SPC (PDF) |
| 10 | Yield Modeling (PDF) |
| 11 | Introduction to Analysis of Variance (PDF) |
| 12 | Full Factorial Models (PDF) |
| 13 | Modeling Testing and Fractional Factorial Models (PDF) |
| 14 | Aliasing and Higher Order Models (PDF) |
| 15 | Response Surface Modeling and Process Optimization (PDF) |
| 16 | Process Robustness (PDF) |
| 17 | Nested Variance Components (PDF) |
| 18 | Sequential Experimentation (PDF) |
| 19 | Case Study 1: Tungsten CVD DOE/RSM (PDF) |
| 20 | Case Study 2: Cycle to Cycle Control (PDF) |
| 21 | Case Study 3: Spatial Modeling (PDF) |
| 22 | Case Study 4: "Modeling the Embossing/Imprinting of Thermoplastic Layers." (PDF - 2.4MB) |
